Subheadings
84.86.10
Machines and apparatus of a kind used solely or principally for the manufacture of semiconductor boules or wafers
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84.86.20
Machines and apparatus of a kind used solely or principally for the manufacture of semiconductor devices or of electronic integrated circuits
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84.86.30
Machines and apparatus of a kind used solely or principally for the manufacture of flat panel displays
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84.86.40
Machines and apparatus of a kind used solely or principally for the manufacture or repair of masks and reticles, assembling semiconductor devices or electronic integrated circuits, or for lifting, handling, loading or unloading items of heading 8486
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84.86.90
Machines and apparatus of heading 8486; parts and accessories
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